专利内容由知识产权出版社提供
专利名称：SILICON NITRIDE FILTER AND METHOD OF
MANUFACTURE THEREOF
发明人：MIYAKAWA, Naomichi, Asahi Glass Company,
Ltd,SHINOHARA, Nobuhiro, Asahi GlassCompany, Limited,ARAI, Kanji, Asahi GlassCompany, Limited,TAKAHASHI, Hideo, AsahiGlass Company, Limited
申请号：EP00985807.7申请日：20001220公开号：EP1160223A1公开日：20011205
摘要：Array
申请人：ASAHI GLASS COMPANY LTD.
地址：12-1, Yurakucho 1-chome, Chiyoda-ku Tokyo 100-8405 JP
国籍：JP
代理机构：Müller-Boré & Partner Patentanwälte
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