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专利名称：PROCESS FOR COATING SUBSTRATES发明人：WHITE, Norman, Henry Applied Vision
Ltd.,WAUGH, Allen, Robert Applied VisionLtd.,SPENCER, Alaric, Graham Applied VisionLtd.,WALLS, John, Michael Applied Vision Ltd.
申请号：EP95911413.3申请日：19950317公开号：EP0699245B1公开日：20011121
摘要：The invention relates to apparatus for depositing of materials onto at least onesubstrate (2) mounted on a substrate carrier (4) provided for rotation in a materialdepositing zone in a vacuum chamber (6) and causing a reaction of the said material toform a coating having desired properties. In a first aspect of the invention there isprovided a loading chamber in selective interconnection with the vacuum chamber toallow the substrate carrier and substrates therein to be moved to and from the vacuumchamber whilst maintaining a vacuum therein and in a second aspect the carrier and/orthe vacuum chamber walls are provided with linear protrusions (12) to restrict the flow ofreactive gases in the chamber and thereby reduce the occurence of arcing and bothaspects allowing the dimensions of the coating apparatus to be reduced in comparison toconventional coating apparatus.
申请人：APPLIED VISION LTD
地址：GB
国籍：GB
代理机构：Wood, Graham
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