专利内容由知识产权出版社提供
专利名称：Acoustic method and apparatus for
measuring micron and submicron distances
发明人：George J. Kren,Franklin R. Koenig申请号：US06/040930申请日：19790521公开号：US04285053A公开日：19810818
摘要：A gauge for measuring variations in distance of a surface relative to a referenceby means of phase shifts in a zone of high acoustic impedance. A gauge head is providedwith a first orifice for emitting acoustic waves, driven by a reference signal, toward asurface positioned very close to the gauge head, forming a high impedance zone. Asecond orifice in the gauge head picks up acoustic waves subjected to the zone and thesewaves are converted to electrical signals for comparison to the reference signal in aphase detector. The phase error between the two signals is indicative of surface distancevariations.
申请人：TENCOR INSTRUMENTS
代理人：Thomas Schneck
更多信息请下载全文后查看
